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Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon / Daliento, S., Mele, L., Spirito, P., Gialanella, L., Limata, B.N., Romano, M.. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS. - ISSN 0168-583X. - STAMPA. - 253:(2006), pp. 90-93.

Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon

DALIENTO, SANTOLO;SPIRITO, PAOLO;GIALANELLA, LUCIO;LIMATA, BENEDICTA NORMANNA;ROMANO, MARIO
2006
2006
Experimental measurement of in-depth secondary defect distribution prodced by Helium implantation in silicon / Daliento, S., Mele, L., Spirito, P., Gialanella, L., Limata, B.N., Romano, M.. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS. - ISSN 0168-583X. - STAMPA. - 253:(2006), pp. 90-93.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11588/200728
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