Vector vortex beams generated by q-plates as a versatile route to direct fs laser surface structuring

We report an experimental investigation on direct laser surface structuring with femtosecond vector vortex beams generated by means of q-plates with topological charges q = 1, 3/2, 2, 5/2. Structured light beams with spatially variant state of polarization and intensity are generated and applied to multi-pulse irradiation of a solid crystalline silicon target. The creation of a variety of surface structures, like laser induced periodic surface structures, multi-spot arrays and shaped ablation craters, is demonstrated by direct laser surface structuring with vector vortex beams at different values of q. The features of the surface structures are compared with the vector vortex beam characteristics at the focal plane, evidencing their relationship with the polarization and intensity profile of the laser beams. Our experimental findings show that vector vortex beams produced by q-plates can offer a valuable and versatile route to imprint unconventional surface structures on a solid target through a mask-free ablative process and step scan processing.