tMedical grade polydimethylsiloxane (PDMS) elastomer is a biomaterial widely used in medicine and high-tech devices, e.g. MEMS and NEMS. In this work, we report an experimental investigation on femtosecondlaser processing of PDMS-elastomer with near infrared (NIR), visible (VIS) and ultraviolet (UV) pulses.High definition trenches are produced by varying processing parameters as laser wavelength, pulse dura-tion, fluence, scanning speed and overlap of the subsequent pulses. The sample surface morphology andchemical composition are investigated by Laser Microscopy, SEM and Raman spectroscopy, addressingthe effects of the various processing parameters through comparison with the native materials charac-teristics. For all the laser pulse wavelengths used, the produced tracks are successfully metalized with Nivia electro-less plating method. We observe a negligible influence of the time interval elapsed betweenlaser treatment and metallization process. Our experimental findings suggest promising perspectives offemtosecond laser pulses in micro- and nano-fabrication of hi-tech PDMS devices.
Fs-laser processing of medical grade polydimethylsiloxane (PDMS) / Atanasov, P. A; Stankova, N. E.; Nedyalkov, N. N.; Fukata, N.; Hirsch, D.; Rauschenbach, B.; Amoruso, Salvatore; Wang, Xuan; Kolev, K. N.; Valova, E. I.; Georgieva, J. S.; Armyanov, S. t. A.. - In: APPLIED SURFACE SCIENCE. - ISSN 0169-4332. - 374:(2016), pp. 229-234. [10.1016/j.apsusc.2015.11.175]
Fs-laser processing of medical grade polydimethylsiloxane (PDMS)
AMORUSO, SALVATORE;
2016
Abstract
tMedical grade polydimethylsiloxane (PDMS) elastomer is a biomaterial widely used in medicine and high-tech devices, e.g. MEMS and NEMS. In this work, we report an experimental investigation on femtosecondlaser processing of PDMS-elastomer with near infrared (NIR), visible (VIS) and ultraviolet (UV) pulses.High definition trenches are produced by varying processing parameters as laser wavelength, pulse dura-tion, fluence, scanning speed and overlap of the subsequent pulses. The sample surface morphology andchemical composition are investigated by Laser Microscopy, SEM and Raman spectroscopy, addressingthe effects of the various processing parameters through comparison with the native materials charac-teristics. For all the laser pulse wavelengths used, the produced tracks are successfully metalized with Nivia electro-less plating method. We observe a negligible influence of the time interval elapsed betweenlaser treatment and metallization process. Our experimental findings suggest promising perspectives offemtosecond laser pulses in micro- and nano-fabrication of hi-tech PDMS devices.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
