This paper investigates the temperature dependence of the resonance frequency for locally heated cantilever beams and proposes a solution to minimize it. In the first part of the paper a theoretical study, supported by simulations, is carried out in order to determine the temperature distribution on locally heated cantilever beams. The theoretical results are supported by measurements performed with an IR camera. Knowing the temperature distribution on the cantilever beams, the frequency shifts due to the temperature gradient on the beams is calculated. A comparison between three locally heated cantilever beams made of Si, SiO2 and SiN shows that SiN is the best choice in order to minimize the temperature dependence of the resonance frequency. Measurements on a SiN cantilever paddle show that its resonance frequency is constant with heater temperature for temperature up to 590 K. The device exhibits a temperature dependence of the resonance frequency of about 20 ppm/K, for heater temperature from 590 K to 920 K
Resonance frequency of locally heated cantilever beams / E., Iervolino; Riccio, Michele; F., Santagata; J., Wei; A. W., van Herwaarden; Irace, Andrea; Breglio, Giovanni; P. M., Sarro. - In: SENSORS AND ACTUATORS. A, PHYSICAL. - ISSN 0924-4247. - 190:(2013), pp. 6-12. [10.1016/j.sna.2012.10.008]
Resonance frequency of locally heated cantilever beams
RICCIO, MICHELE;IRACE, ANDREA;BREGLIO, GIOVANNI;
2013
Abstract
This paper investigates the temperature dependence of the resonance frequency for locally heated cantilever beams and proposes a solution to minimize it. In the first part of the paper a theoretical study, supported by simulations, is carried out in order to determine the temperature distribution on locally heated cantilever beams. The theoretical results are supported by measurements performed with an IR camera. Knowing the temperature distribution on the cantilever beams, the frequency shifts due to the temperature gradient on the beams is calculated. A comparison between three locally heated cantilever beams made of Si, SiO2 and SiN shows that SiN is the best choice in order to minimize the temperature dependence of the resonance frequency. Measurements on a SiN cantilever paddle show that its resonance frequency is constant with heater temperature for temperature up to 590 K. The device exhibits a temperature dependence of the resonance frequency of about 20 ppm/K, for heater temperature from 590 K to 920 KI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
