In this paper, the characterisation of micro-features involved in metrology applications within the scope of 4M is carried out through the use of different two-dimensional frequency analysis procedures. Firstly, the analysis methods are introduced and their basic principles are illustrated. Secondly, selected test cases, representing the issue of experimental research activities performed at the laboratory sites of the co-author’s partner organisations, are presented with reference to diverse metrology purposes in different fields of applications.
Metrology Applications of Two-Dimensional Frequency Analysis for Micro-Features Characterisation / Teti, Roberto; L., Mattsonn; A., Lebar; M., Junkar. - STAMPA. - (2005), pp. 259-262.
Metrology Applications of Two-Dimensional Frequency Analysis for Micro-Features Characterisation
TETI, ROBERTO;
2005
Abstract
In this paper, the characterisation of micro-features involved in metrology applications within the scope of 4M is carried out through the use of different two-dimensional frequency analysis procedures. Firstly, the analysis methods are introduced and their basic principles are illustrated. Secondly, selected test cases, representing the issue of experimental research activities performed at the laboratory sites of the co-author’s partner organisations, are presented with reference to diverse metrology purposes in different fields of applications.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
