This paper reports the production of Lead-free (1-x)(BaZr0.2Ti0.8O3)-x(Ba0.7Ca0.3O3) ferro/piezoelectric thin films by means of repeated chemical solution deposition routes. Two different kinds of precursor solutions were compared: i) a literature standard precursor solution involving the use of 2-methoxyethanol (2-MOE) which is a toxic and carcinogenic solvent and ii) a “greener” precursor solution based on 1-methoxy-2-propanol (PGME), a non-toxic and non-carcinogenic solvent. Morphology, crystal structure and ferroelectric behavior of the films is also reported.
Green production of lead-free BZT-BCT thin films for applications in MEMS devices / Barbato, P. S.; Casuscelli, V.; Aprea, P.; Scaldaferri, R.; Pedaci, I.; Caputo, D.. - In: CHEMICAL ENGINEERING TRANSACTIONS. - ISSN 2283-9216. - 84:(2021), pp. 97-102. [10.3303/CET2184017]
Green production of lead-free BZT-BCT thin films for applications in MEMS devices
Barbato P. S.;Aprea P.;Caputo D.
2021
Abstract
This paper reports the production of Lead-free (1-x)(BaZr0.2Ti0.8O3)-x(Ba0.7Ca0.3O3) ferro/piezoelectric thin films by means of repeated chemical solution deposition routes. Two different kinds of precursor solutions were compared: i) a literature standard precursor solution involving the use of 2-methoxyethanol (2-MOE) which is a toxic and carcinogenic solvent and ii) a “greener” precursor solution based on 1-methoxy-2-propanol (PGME), a non-toxic and non-carcinogenic solvent. Morphology, crystal structure and ferroelectric behavior of the films is also reported.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
