This work reports about the production and characterization of Barium Zirconate Titanate-Barium Calcium Titanate (BZT-BCT) ferroelectric-piezoelectric thin films proposed as an alternative to toxic lead zirconate titanate (commonly referred as PZT), widely used in micro-electro-mechanical devices. A highly stable and homogeneous solution, produced thanks to a thorough reagents dehydration, has been deposited on commercial platinum-coated wafers, thus obtaining perovskites thin layers with homogeneous morphology and improved electrical stability with outstanding electrical performances in planar configuration.
Assessing lead-free barium zirconate titanate-barium calcium titanate thin films ferroelectric properties in planar configuration / Barbato, P. S.; Casuscelli, V.; Aprea, P.; Scaldaferri, R.; Caputo, D.. - (2021), pp. 121-125. (Intervento presentato al convegno 6th International Forum on Research and Technology for Society and Industry, RTSI 2021 tenutosi a ita nel 2021) [10.1109/RTSI50628.2021.9597294].
Assessing lead-free barium zirconate titanate-barium calcium titanate thin films ferroelectric properties in planar configuration
Barbato P. S.;Aprea P.;Caputo D.
2021
Abstract
This work reports about the production and characterization of Barium Zirconate Titanate-Barium Calcium Titanate (BZT-BCT) ferroelectric-piezoelectric thin films proposed as an alternative to toxic lead zirconate titanate (commonly referred as PZT), widely used in micro-electro-mechanical devices. A highly stable and homogeneous solution, produced thanks to a thorough reagents dehydration, has been deposited on commercial platinum-coated wafers, thus obtaining perovskites thin layers with homogeneous morphology and improved electrical stability with outstanding electrical performances in planar configuration.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
