A theoretical study aimed at the optimum design of thermo- optic guided-wave switches realized in silicon-on-oxide technology is reported. The heat transfer processes occurring inside such devices are analyzed by means of a 3D finite element thermal simulator. In particular, in rib waveguiding structures, we demonstrate that the optimum values of the oxide layer thickness and of the outer rib height are a function of the heating pulse power used to drive the device. The theoretical results carried out are consistent with the experiments reported in literature.
Silicon-on-insulator guided-wave structures for thermo-optic switching applications / Rendina, I.; Cocorullo, G.; Della Corte, F. G.. - (1997). (Intervento presentato al convegno Photonics West 97 tenutosi a San Jose (CA, USA) nel 1997) [10.1117/12.273853].
Silicon-on-insulator guided-wave structures for thermo-optic switching applications
F. G. Della Corte
1997
Abstract
A theoretical study aimed at the optimum design of thermo- optic guided-wave switches realized in silicon-on-oxide technology is reported. The heat transfer processes occurring inside such devices are analyzed by means of a 3D finite element thermal simulator. In particular, in rib waveguiding structures, we demonstrate that the optimum values of the oxide layer thickness and of the outer rib height are a function of the heating pulse power used to drive the device. The theoretical results carried out are consistent with the experiments reported in literature.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
