Lead-free piezoelectric thin films made of 0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) over Pt/TiOx/SiO2/Si were synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.
0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) thin films deriving from green sol-gel routes / Barbato, P. S.; Aprea, P.; Caputo, D.; Casuscelli, V.; Scaldaferri, R.; Di Matteo, A.. - (2019), pp. 139-142. (Intervento presentato al convegno 8th International Workshop on Advances in Sensors and Interfaces, IWASI 2019 tenutosi a ita nel 2019) [10.1109/IWASI.2019.8791305].
0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) thin films deriving from green sol-gel routes
Barbato P. S.;Aprea P.;Caputo D.;
2019
Abstract
Lead-free piezoelectric thin films made of 0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) over Pt/TiOx/SiO2/Si were synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
