We present an experimental analysis on surface structuring of polydimethylsiloxane films with UV (263nm) femtosecond laser pulses, in air. Laser processed areas are analyzed by optical microscopy, SEM, and μ-Raman spectroscopy. The laser-treated sample shows the formation of a randomly nanostructured surface morphology. μ-Raman spectra, carried out at both 514 and 785nm excitation wavelengths, prior and after laser treatment allow evidencing the changes in the sample structure. The influence of the laser fluence on the surface morphology is studied. Finally, successful electro-less metallization of the laser-processed sample is achieved, even after several months from the laser-treatment contrary to previous observation with nanosecond pulses. Our findings address the effectiveness of fs-laser treatment and chemical metallization of polydimethylsiloxane films with perspective technological interest in micro-fabrication devices for MEMS and nano-electromechanical systems.
Fs-laser processing of polydimethylsiloxane / Petar A., Atanasov; Nikolay N., Nedyalkov; Eugenia I., Valova; Zhenya S., Georgieva; Stefan A., Armyanov; Konstantin N., Kolev; Amoruso, Salvatore; Xuan, Wang; Bruzzese, Riccardo; Miroslaw, Sawczak; Gerard, ?liwi?ski. - In: JOURNAL OF APPLIED PHYSICS. - ISSN 0021-8979. - 116:(2014), pp. 023104-1-023104-4. [10.1063/1.4887812]
Fs-laser processing of polydimethylsiloxane
AMORUSO, SALVATORE;BRUZZESE, RICCARDO;
2014
Abstract
We present an experimental analysis on surface structuring of polydimethylsiloxane films with UV (263nm) femtosecond laser pulses, in air. Laser processed areas are analyzed by optical microscopy, SEM, and μ-Raman spectroscopy. The laser-treated sample shows the formation of a randomly nanostructured surface morphology. μ-Raman spectra, carried out at both 514 and 785nm excitation wavelengths, prior and after laser treatment allow evidencing the changes in the sample structure. The influence of the laser fluence on the surface morphology is studied. Finally, successful electro-less metallization of the laser-processed sample is achieved, even after several months from the laser-treatment contrary to previous observation with nanosecond pulses. Our findings address the effectiveness of fs-laser treatment and chemical metallization of polydimethylsiloxane films with perspective technological interest in micro-fabrication devices for MEMS and nano-electromechanical systems.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
