Azopolymer-based maskless lithography enables direct, all-optical fabrication of complex surface patterns. However, typical surface reliefs are limited to smooth profiles. Here, by investigating the resolution, contrast ratio, and gray-scale nonlinearities of a holo-lithographic setup based on computer-generated holography, we extend this patterning approach to fabricate, for the first time, multilevel reliefs with step-like discontinuities.
Multilevel azopolymer patterning from digital holographic lithography / Salvatore, Marcella; Reda, Francesco; Borbone, Fabio; Oscurato, Stefano Luigi. - In: RSC APPLIED INTERFACES. - ISSN 2755-3701. - 2:1(2025), pp. 56-60. [10.1039/D4LF00358F]
Multilevel azopolymer patterning from digital holographic lithography
Marcella Salvatore;Francesco Reda;Fabio Borbone;Stefano Luigi Oscurato
2025
Abstract
Azopolymer-based maskless lithography enables direct, all-optical fabrication of complex surface patterns. However, typical surface reliefs are limited to smooth profiles. Here, by investigating the resolution, contrast ratio, and gray-scale nonlinearities of a holo-lithographic setup based on computer-generated holography, we extend this patterning approach to fabricate, for the first time, multilevel reliefs with step-like discontinuities.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
